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Zr 702 Zirconium Round Plate Target for Sputtering Coating
Zirconium Sputtering Target Circular / planar / tubular. Custom-made form as per drawing
Zirconium Sputtering Target Circular / planar / tubular. Custom-made form as per drawingZirconium (Zr) 702 UNS R 60702 Sheets / Plates ASTM B 551 ASME SB 55
Zirconium Target, Zirconium Metal Target, Zirconium Sputtering Target, Zirconium Metal Sputtering Target, Zr Target, Zr Metal Target, Zr Sputtering Target, Zr Metal Sputtering Target
1. Product name: High purity Zirconium Targets
2. Purity: Zr+Hf>99.95%, Hf<300ppm.
3. Confirmation: ISO9001:2008 certified
4. Standard:GB/T OR ASTM B550
5.Trace Elements
Chemical composition
Grade
|
Element composition(%)<
| ||||||||
Zr+Hf
|
Hf
|
Fe+Cr
|
Sn
|
H
|
N
|
C
|
Nb
|
O
| |
R60702
|
99.2
|
4.5
|
0.20
|
--
|
0.005
|
0.025
|
0.05
|
--
|
0.16
|
R60703
|
98
|
4.5
|
--
|
--
|
--0.005
|
0.025
|
--
|
--
|
--
|
R60704
|
97.5
|
4.5
|
0.20~0.40
|
1.0~2.0
|
0.005
|
0.025
|
0.05
|
--
|
0.18
|
R60705
|
95.5
|
4.5
|
0.2
|
--
|
0.005
|
0.025
|
0.05
|
2.0~3.0
|
0.18
|
R60706
|
95.5
|
4.5
|
0.2
|
--
|
0.005
|
0.025
|
0.05
|
2.0~3.0
|
0.18
|
6.Following standards to be applied if no specific tolerance for billets is provided.
Dimension
|
Square
|
Tolerance
|
Measuring tools
|
Remarks
|
L(mm)
|
L
|
>-3
|
calliper or tape
|
L,W,T represents length, width and thickness of the square.
|
W(mm)
|
W
|
>-3
|
calliper or tape
| |
T(mm)
|
T
|
>-1
|
calliper
|
7.Following standards are to be applied when no specific requirements on flatness, parallelism and perpendicularity for products are provided.
(1) Flatness Standard;
Shape
|
Round
|
Square
|
Round
|
Square
|
Square
|
Remarks
|
Dimension(mm)
|
D≤300
|
L≤500
|
D>300
|
500
|
X>1000
| |
Tolerance(mm)
|
0.1
|
0.3
|
0.5
|
Thickness>8mm
| ||
Tolerance(mm)
|
0.25
|
0.35
|
0.5
|
Thickness≤8mm
| ||
(2)Parallelism and Perpendicularity
Dimension(mm)
|
D≤300
|
L≤400
|
D>300
|
400
|
X>800
|
Parallelism(mm)
|
0.1
|
0.25
|
0.3
| ||
Perpendicularity(mm)
|
0.15
|
0.25
|
0.3
| ||
(3)Roughness
Part
|
Back
|
Sputtering surface
|
The side and other surfaces
|
Ra(μm)
|
0.8-1.6
|
0.8-1.6
|
3.2
|
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