high purity zirconium sputtering rotary tube targetGood Price Hot Sales Zirconium Zr Target for Sputtering Coating1. Product name: High purity Zirconium Targets
2. Purity: Zr+Hf>99.95%, Hf<300ppm.
3. Confirmation: ISO9001:2008 certified
4. Standard:GB/T OR ASTM B550
5.Trace Elements
Grade
|
Main Elements(ppm,max)
| ||||||||
Hf
|
Nb
|
Mo
|
Cr
|
Al
|
Ti
|
Mn
|
Ni
| ||
Zr+Hf>99.95%
|
200
|
5
|
10
|
10
|
100
|
10
|
5
|
50
| |
Cu
|
Sn
|
Sb
|
W
|
Pb
|
Bi
|
Mg
|
P
| ||
5
|
50
|
5
|
10
|
5
|
5
|
5
|
10
| ||
Si
|
N
|
C
|
H
|
O
|
S
|
Fe
| |||
100
|
30
|
30
|
10
|
150
|
20
|
100
| |||
6.Following standards to be applied if no specific tolerance for billets is provided.
Dimension
|
Square
|
Tolerance
|
Measuring tools
|
Remarks
|
L(mm)
|
L
|
>-3
|
calliper or tape
|
L,W,T represents length, width and thickness of the square.
|
W(mm)
|
W
|
>-3
|
calliper or tape
| |
T(mm)
|
T
|
>-1
|
calliper
|
7.Following standards are to be applied when no specific requirements on flatness, parallelism and perpendicularity for products are provided.
(1) Flatness Standard;
Shape
|
Round
|
Square
|
Round
|
Square
|
Square
|
Remarks
|
Dimension(mm)
|
D≤300
|
L≤500
|
D>300
|
500
|
X>1000
| |
Tolerance(mm)
|
0.1
|
0.3
|
0.5
|
Thickness>8mm
| ||
Tolerance(mm)
|
0.25
|
0.35
|
0.5
|
Thickness≤8mm
| ||
(2)Parallelism and Perpendicularity
Dimension(mm)
|
D≤300
|
L≤400
|
D>300
|
400
|
X>800
|
Parallelism(mm)
|
0.1
|
0.25
|
0.3
| ||
Perpendicularity(mm)
|
0.15
|
0.25
|
0.3
| ||
(3)Roughness
Part
|
Back
|
Sputtering surface
|
The side and other surfaces
|
Ra(μm)
|
0.8-1.6
|
0.8-1.6
|
3.2
|
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